Nanopositioner

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This patent describes an improved nanopositioner, a device used to move objects with extremely high precision. The invention centers on a novel arrangement where a spring element applies only a controlled normal (perpendicular) force between the object and its support, regardless of the object's position. This ensures that only the desired force is applied, preventing unwanted lateral forces that could hinder precise or repeatable movements, especially in slip-stick drive systems commonly used for nanometer-scale positioning.

Use CasesContent extracted from patent full text and abstract with AI.

• Positioning samples or probes in scanning probe microscopes (SPMs) such as atomic force microscopes or scanning tunneling microscopes.
• Manipulating or aligning nanostructures and microcomponents in nanofabrication and semiconductor manufacturing.
• Precise control of optical elements, such as mirrors or lenses, in optical or photonic research setups.
• Biological or medical laboratory automation requiring precise movement of small samples or sensors.
• Calibration and adjustment tasks in high-precision metrology instruments.

BenefitsContent extracted from patent full text and abstract with AI.

• Provides highly reproducible and precise movement by applying a constant normal force regardless of the object's exact position.
• Eliminates unwanted lateral forces, improving operational reliability and reducing the risk of unpredictable or jerky movements—especially important for slip-stick drive systems.
• Enables greater movement range for objects without loss of precision, since the applied force does not change with travel distance.
• Allows for orientation-independent operation, as gravity is not the main source of normal force.
• Facilitates easier setup and insertion of objects due to dedicated design features (e.g., specially shaped intercept pieces) that aid object handling in restricted environments such as ultrahigh vacuum systems.
• Adaptable for multi-dimensional movement and can be implemented in units for complex or multi-point actuation.

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Inventors & Applicants

Patent Abstract

The invention relates to a nanopositioner. Said nanopositioner comprises at least one actuator with at least one support for the object to be moved, said support being movable by the deflection of the actuator, and a spring element which may impinge a normal force acting between the object and the support upon the object to be moved. According to the invention, the spring element is connected to the support in such a way that the tensile state of the spring element is independent from the position of the object to be moved. Based on this measure and independent from the concrete position of the object, a purely normal force is exerted between object and support. No lateral force is exerted which would act against the movement of the object by the actuator and thus would restrict it or make it non-reproductible. This is particularly important for slip-stick drives in which the object is always alternately in static and sliding friction relative to the support. The friction conditions are here significantly determined by the normal force which is exerted in a defined manner according to the invention.