Apparatus and Method for Electromechanical Positioning

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This invention describes a compact apparatus and method for precise electromechanical positioning using at least one tubular piezoelectric element containing a movable rotor (runner) inside. The system utilizes at least one elastic friction element connected to the piezo tube to provide a controlled normal force onto the rotor. Innovations include more reliable and stable clamping and guidance mechanisms, facilitating smoother, vibration-free movement ideal for nanometer-scale position control, as well as a method for controlling such positioners without introducing significant electrical noise or mechanical vibration.

Use CasesContent extracted from patent full text and abstract with AI.

• Precise positioning of probe tips in scanning probe microscopes (SPMs) such as scanning tunneling microscopes (STM) or atomic force microscopes (AFM) for nanoscale imaging and manipulation.
• Nanopositioning systems in semiconductor manufacturing for the alignment and movement of minute components.
• High-precision optical systems where mirrors or lenses need to be adjusted with nanometer accuracy.
• Micro-assembly robots for lab-on-chip devices or MEMS devices, requiring fine movement control.
• Medical instruments for minimally invasive surgeries or precise drug delivery systems.

BenefitsContent extracted from patent full text and abstract with AI.

• Enables highly accurate, stable, and reproducible movement at nanometer resolution.
• Reduces or eliminates mechanical vibrations typically associated with prior positioner designs, improving measurement fidelity.
• Minimizes electrical noise or interference in sensitive measurement applications (like tunnel current measurements).
• Allows for the use of replaceable tips/probes without recalibrating or excessively adjusting the force, saving time and improving usability.
• Compact design (as small as 3 mm diameter), enabling integration into small instruments where space is limited.
• More reliable clamp force application compared to previous approaches (less drift, less manual adjustment, less risk of jamming or misalignment).
• Suitable for both inertial (slip-stick) and smooth, continuous translation operation modes, increasing versatility.

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Patent Abstract

The invention relates to an apparatus having at least one tubular piezo element for the electromechanical positioning of a rotor on the inside of the piezo element. Said apparatus is characterized by at least one elastic friction means for applying a normal force onto the rotor, said friction means being connected to the piezo element. A method for controlling the apparatus is disclosed.