Method for the Polymerization of a Composition Containing Hydridosilanes and for the Subsequent Use of the Polymers to Produce Layers Containing Silicon

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This invention describes a new method for polymerizing hydridosilanes using acoustic cavitation (ultrasound) and utilizing the resulting polymers to create silicon-containing layers. The process involves exposing a substrate to a hydridosilane composition, polymerizing it efficiently with ultrasound, and then coating the substrate with the reaction products to form thin silicon layers. It also provides a specially designed device for carrying out this method, enabling more straightforward, faster, and controlled fabrication of high-quality silicon thin films, potentially including embedded nanoparticles.

Use CasesContent extracted from patent full text and abstract with AI.

• Manufacture of thin-film silicon solar cells and photovoltaic devices
• Fabrication of silicon-based electronic components such as photodiodes and thin-film transistors
• Production of semiconductor or insulating layers for flexible electronics
• Creation of high-quality coatings for optoelectronic devices
• Manufacture of nanocomposite films with embedded nanoparticles for enhanced device performance
• Deposition of uniform silicon or nanostructured layers on a variety of substrates, both flat and structured
• Production of coatings for light-trapping or plasmonic applications in solar cells

BenefitsContent extracted from patent full text and abstract with AI.

• Significantly faster polymerization and coating process compared to traditional UV or thermal methods
• Less energy-intensive and safer process, avoiding prolonged heating or UV exposure
• Ability to precisely control film thickness, morphology, and nanostructure through process parameters
• Reduced material waste due to more efficient film deposition (e.g., via aerosol rather than spin-coating)
• Homogeneous and uniform coating even on structured or non-flat substrates
• Capability to disperse and embed nanoparticles in-situ, improving film functionality and consistency
• Versatility for different substrate types and adaptable to various industrial processes
• Immediate start/stop of chemical reactions using ultrasound, offering high process control

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Patent Abstract

The invention relates to a method for the polymerization of a composition containing hydridosilanes and for the subsequent use of the polymers to produce layers containing silicon, comprising the following steps: a) providing a substrate, b) providing a composition containing at least one hydridosilane that is dissolved in at least one organic and/or inorganic solvent or containing at least one hydridosilane that is already liquid without solvents, wherein the hydridosilanes comprise at least one linear and/or branched hydridosilane of the general formula SinH2n+2 with n ≥ 3 and/or one cyclic hydridosilane of the general formula SinH2n with n ≥ 3, c) polymerizing the composition from step b) by means of acoustic cavitation, d) coating the surface of the substrate with reaction products from step c). The invention further relates to a device for the polymerization of a composition containing hydridosilanes and for the subsequent use of the polymers to produce layers containing silicon, comprising at least one reaction container (1) containing a composition that contains at least one hydridosilane dissolved in at least one organic and/or inorganic solvent or at least one hydridosilane that is already liquid without solvents, wherein the hydridosilanes comprise at least one linear and/or branched hydridosilane of the general formula SinH2n+2 with n ≥ 3 and/or one cyclic hydridosilane of the general formula SinH2n with n ≥ 3, and/or containing the hydridosilane solution mentioned above and/or the pure liquid hydridosilane, to which at least mono- and/or disilane and/or a boron-containing dopant and/or phosphorus-containing dopant and/or noble gas from the group Ar, He and/or nanoparticles and/or a polymerization initiator and/or a catalyst and/or surface-tension-modifying agents are added, and an ultrasound source or a sound transducer (4) for producing acoustic cavitation and/or capillary waves, wherein the reaction container (1) has at least one closable opening (6) and the substrate (8) to be coated is arranged facing the opening (6) and the substrate (8) has a heating source (9) on the surface facing away from the coating surface.