Sensor Arrangement Comprising a Carrier Substrate and a Ferroelectric Layer and Method for Producing and Using the Sensor Arrangement

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This patent describes a sensor arrangement that uses a crystalline ferroelectric layer mounted on a carrier substrate to sensitively detect changes in mechanical pressure or bending. The sensor operates by reading the permittivity (a property related to how a material responds to electric fields) changes in the ferroelectric layer when mechanical forces are applied. The arrangement offers a highly sensitive and cost-effective way to detect pressure or strain, with the ferroelectric layer being manufactured using standard thin-film deposition techniques onto flexible or rigid substrates.

Use CasesContent extracted from patent full text and abstract with AI.

• Ultra-sensitive pressure sensors for industrial automation and robotics
• Bending or strain sensors for structural health monitoring in buildings, bridges, or aerospace
• Precision flow or pressure measurement in medical devices (e.g., ventilators, infusion pumps)
• Touch-sensitive surfaces in consumer electronics, like advanced touchscreens
• Position sensors in precise automation systems
• Safety switches, such as airbags or automotive crash detection systems
• Temperature and pressure measurement in scientific instrumentation (e.g., Golay cells)
• Wearable sensors for biosignal monitoring (e.g., pulse, respiration)
• Integration into smart materials for adaptive systems

BenefitsContent extracted from patent full text and abstract with AI.

• Extremely high sensitivity to small mechanical forces (pressure or bending), enabling precise measurements
• Reduced risk of false signals from temperature changes, improving reliability
• Cost-effective and relatively simple manufacturing using conventional thin-film processes
• Adaptability—variety of ferroelectric materials and substrates can be chosen for specific requirements
• Reversible operation: sensor returns to its baseline state after removal of force, allowing repeated use
• Potential for both capacitive (electrical) and contactless (optical) readout, increasing application flexibility
• Miniaturization possible for high-resolution or localized sensing

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Patent Abstract

The invention relates to a sensor arrangement comprising a carrier substrate and a ferroelectric layer arranged on the carrier substrate, wherein the sensor arrangement has means for reading the permittivity of the ferroelectric layer. The arrangement is characterised in that the ferroelectric layer is arranged in a crystalline manner on the carrier substrate. The invention also relates to a method for producing the sensor arrangement and to a use thereof.