Method for Transfer of Graphene Pieces onto a Substrate

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The patent describes a method and device for precisely transferring multiple small pieces of graphene onto designated locations on a substrate, such as a silicon wafer. The process uses a transfer layer with aligned openings and a liquid medium to position graphene pieces accurately over specific placeholders, minimizing waste and defects. The invention also includes the substrate produced by this process and an apparatus to carry out the method.

Use CasesContent extracted from patent full text and abstract with AI.

• Manufacture of large-scale graphene-based electronic devices, such as graphene field-effect transistors (G-FETs) on semiconductor wafers.
• Integration of graphene into integrated circuits at specific chip sites for electronic or optoelectronic applications.
• Fabrication of sensor arrays utilizing graphene's unique electrical properties.
• Research and development of other two-dimensional materials for device fabrication using similar transfer techniques.
• Production of flexible or transparent electronic substrates with precisely placed graphene segments.

BenefitsContent extracted from patent full text and abstract with AI.

• Significantly higher yield and efficiency compared to conventional wet-transfer methods (up to 80% accurate placement, using as little as 5% of the graphene material otherwise wasted).
• Precise alignment and placement of multiple graphene pieces onto large substrates, suitable for industrial-scale semiconductor manufacturing.
• Minimized defects such as cracks or folds in the transferred graphene, leading to higher quality devices.
• Flexible adaptation to different substrate sizes, shapes, and chip arrangements.
• Reduction in material cost and waste, making graphene device fabrication more economical.

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Patent Abstract

The invention relates to a method for transferring graphene pieces onto a substrate, said method being characterized by the following steps: a) a substrate with a plurality of placeholders for the graphene pieces is selected; b) the substrate is arranged and aligned on a substrate holder in a chamber; c) a transfer layer with openings is selected as the placeholder for the graphene pieces; d) the transfer layer is arranged and aligned on the substrate holder over the substrate such that the openings of the transfer layer are aligned over the placeholders on the substrate; e) liquid is filled into the chamber up to above the transfer layer, and the transfer layer is lifted on the liquid column; f) graphene pieces are introduced onto the liquid film in the openings of the transfer layer; and g) the distance between the substrate and the graphene pieces is reduced until the graphene pieces are arranged on the placeholders of the substrate. The invention also relates to a substrate produced in this manner and to a device for carrying out the method.