Fabrication of Three-Dimensional Electrodes by Template-Assisted Electrochemical Deposition

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This patent discloses a novel method for manufacturing three-dimensional microelectrode arrays (MEAs) using template-assisted electrochemical deposition. The process starts with a standard two-dimensional electrode substrate, onto which 3D hollow cylinders (templates) are 3D-printed at desired locations and heights using a high-resolution technique like two-photon polymerization. These cylinders are then filled with electrically conductive materials (such as gold or PEDOT:PSS) via electrochemical deposition, forming vertical, high-aspect-ratio electrodes. The method enables precise fabrication of complex, customizable 3D microelectrode structures for applications in neural interfacing, biosensing, and tissue engineering.

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• Neural implants for brain-computer interfaces and neuroscience research
• Retinal implants and vision restoration prosthetics
• In vitro measurement and stimulation of neuronal cell cultures and organoids
• High-resolution and multi-site electrophysiological recordings in tissues (e.g., retina, heart, peripheral nerves)
• Advanced biosensors for electrochemical signal detection
• Microelectrode arrays for drug testing or disease modeling in 3D cell systems

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• Simplifies fabrication of true 3D microelectrode arrays compared to traditional multi-step or complex methods
• Allows high customization—electrode height, diameter, spacing, and geometry can be easily adjusted
• Reduces need for additional microfabrication steps—templates serve both as mold and electrical insulation
• Enables high-density, high-resolution electrode arrays with minimal tissue damage due to small electrode diameter
• Suitable for both flexible and rigid substrates—adaptable for in vitro and in vivo applications
• Facilitates multi-depth recordings to address the needs of modern 3D tissue models
• Improves biocompatibility and electrical properties through selective material choice and coatings (e.g., gold, PEDOT:PSS)
• Faster and more scalable than current state-of-the-art 3D electrode fabrication methods

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Patent Abstract

The present invention relates to a method for producing three-dimensional electrodes or three-dimensional microelectrode arrays by way of template-assisted, in particular electrochemical, deposition, proceeding from two-dimensional substrates.