Method for Protecting the Surface of an Optical Component and Device for Processing Workpieces

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This invention discloses a method and apparatus for protecting the surface of optical components (such as lenses, mirrors, or windows) inside a vacuum chamber during processes like laser or electron beam machining. The core concept is to generate a directed gas flow from the optical component towards the workpiece in the optical path, which shields the component's surface from contaminants (gaseous, liquid, or solid substances) released during processing. This prevents material deposition on the sensitive optical surfaces and thus maintains their functionality over longer operating periods without needing frequent cleaning or replacement.

Use CasesContent extracted from patent full text and abstract with AI.

• Laser machining processes in vacuum chambers, such as laser welding or cutting of metals.
• Electron beam machining or processing (e.g., welding, drilling, or surface treatment) inside evacuated chambers.
• Industrial coating processes like CVD or PVD that occur under reduced pressure and require optical monitoring or processing tools to be kept clean.
• Scientific instrumentation in vacuum environments where optical observation, measurement, or beam delivery is required (e.g., semiconductor manufacturing, material analysis).
• High-vacuum sensors or detectors with optical elements that must remain free from particulate or vapor-based contamination during operation.

BenefitsContent extracted from patent full text and abstract with AI.

• Significantly extends the operating time of optical components in vacuum chambers before cleaning or replacement is required, reducing downtime and maintenance costs.
• Maintains the optical quality (transmission/reflection) of components, ensuring consistent process monitoring and beam delivery.
• Improves process reliability and reduces the risk of instrument failure due to contamination.
• The protective gas flow can be implemented with common inert gases (e.g., argon, nitrogen) which are easily managed in industrial environments.
• Reduces the rate of contamination build-up without requiring complex mechanical shields that themselves become contaminated and need replacement.
• Allows for straightforward adaptation or retrofitting in existing equipment designs.

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Inventors & Applicants

Patent Abstract

The invention relates to a method for protecting the surface of an optical component, wherein an object (8) from which gaseous, liquid or solid substances can be released, in particular a work piece (8) to be processed, is provided in an evacuated vacuum chamber (2) and an optical device is used to observe and/or process the object (8). An optical component (10, 28, 40) of the optical device, having a surface (12, 29, 48) that faces the object and is accessible for the gaseous, liquid or solid substances released from the object (8), is positioned in an optical path (9, 39) of the optical device that extends to the object (8). The surface (12, 29, 48) is protected from the released substances, wherein a gas flow directed in the direction of the object (8) is generated between the surface (12, 29, 48) and the object (8) in the optical path (9, 39). The invention further relates to a device for processing a work piece.