Method for Processing a Probe for Determining Surface Properties or Modifying Surface Structures in the Sub-Micrometer Area and Probe

Simple SummaryContent extracted from patent full text and abstract with AI.

This invention describes a method for precisely coating measurement probes, such as those used in atomic force microscopy (AFM) or scanning tunneling microscopy (STM), to detect or modify surface properties at the sub-micrometer scale. The process involves applying a specially designed polymerizable material to the probe and then selectively polymerizing it using finely controlled light or electron beams, based on a digital control file, leaving the sensitive probe tip exposed. This results in probes with highly tailored, functional coatings—especially electrical insulation—without damaging the fine tip, enabling accurate characterization or modification of extremely small structures.

Use CasesContent extracted from patent full text and abstract with AI.

• Fabrication of AFM or STM probes for nanotechnology research and material science.
• Manufacturing probes for examining electrical, chemical, photoelectrochemical, or catalytic properties of surfaces.
• Production of high-precision probes for manipulation and lithography at the nanoscale, such as moving individual atoms or creating custom surface patterns.
• Development of custom probes for research in biology, medicine, battery technology, catalysis, or photovoltaics, especially where operation in liquids or sensitive functionalization is required.
• Industrial-scale, automated processing of measurement probes with high throughput and reproducibility.

BenefitsContent extracted from patent full text and abstract with AI.

• Non-invasive and gentle coating process—reduces damage to delicate probe tips and maintains probe sharpness and integrity.
• Eliminates post-process exposure or etching steps required in traditional techniques, thus reducing manufacturing complexity, risk, and cost.
• Enables highly selective, customizable coatings (e.g., electrical insulation, catalytic properties) via digital control, including multi-functional or spatially variable coatings.
• Allows higher throughput by enabling simultaneous processing of multiple probes, improving scalability for industrial settings.
• Improves measurement sensitivity, resolution, and accuracy by reducing electrical leakage and enhancing local functionalization.
• Flexibility in material choices and compatibility with advanced 3D printing methods, including two-photon polymerization, for intricate probe geometries.

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The invention relates to a method for processing a measuring probe which is provided to detect surface properties or modify surface structures in the sub-micrometer range. The method according to the invention comprises at least the following steps: Initially providing: a precursor which contains molecules that are polymerizable by light beams or electron beams; and a measuring probe at least comprising a holder with a tip with an upper end opposite the holder; and a light source or electron source for emitting light beams or electron beams at a wavelength and intensity satisfying a minimally required energy input for a polymerization of the precursor; and means for variably positioning the light source or electron source; and a control file and an electronic data processing device, with the control file describing at least a portion of the surface of the measuring probe and serving to control a change in position of the light source or electron source. In the subsequent step, the measuring probe is covered by the precursor and the measuring probe is arranged in the beam path of the light beams or electron beams, whereupon the precursor is exposed to the light beam or electron beam at a plurality of contacting positions, as specified in the control file, with the tip of the measuring probe being left out. Subsequently, the non-exposed regions of the precursor are removed by means of a water or solvent bath or a controlled air or gas flow, and optionally finally developing the regions polymerized by exposure. Furthermore, the invention comprises measuring probes that are manufactured by the method according to the invention.