Drive System for Eccentrically Driven Rotary Axes in a Vacuum Chamber with at Least One Feedthrough

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This patent describes a drive system for eccentrically driven rotary shafts within a vacuum chamber, often used for rotating optical components such as mirrors or gratings in scientific instruments like monochromators. The core innovation is a compact, vacuum-tight actuation mechanism using a metal bellows, a lead screw, and a coupling rod—allowing precise, high-resolution rotational movement from outside the chamber to inside, without compromising the vacuum environment.

Use CasesContent extracted from patent full text and abstract with AI.

• Adjusting and rotating optical elements (mirrors, gratings, crystals) in synchrotron or X-ray monochromators within vacuum chambers
• Scientific instruments requiring ultra-high vacuum (UHV) compatibility and precise rotary actuation
• Vacuum-based analytical equipment, like spectroscopy or electron microscopy systems
• Rotation of components in space or nuclear physics experiments held in vacuum chambers
• Any system where external actuation of a precise rotary motion is needed inside a vacuum-sealed or contaminant-free environment

BenefitsContent extracted from patent full text and abstract with AI.

• Minimizes the space required inside the vacuum chamber, allowing for more compact designs
• Enables precise, high-resolution, and reproducible rotational adjustment of components
• Maintains vacuum integrity, suitable even for UHV applications
• Reduces mechanical complexity and avoids the need for vacuum-incompatible drive elements like ferrofluid rotary feedthroughs
• Allows faster and more accurate angular movement, covering a larger range of rotation compared to prior solutions
• Improved serviceability by situating most drive components outside the vacuum environment

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The invention relates to a drive system for rotary shafts, which are to be driven eccentrically, in a vacuum chamber (6) which comprises at least one feedthrough (3). The drive system primarily comprises at least one bellows (2) having two ends, wherein a first end is open and can be arranged in a vacuum-tight manner in a feedthrough (3) of a vacuum chamber (6), and wherein the bellows (2) can be folded at least in one axis, and wherein the bellows (2) are closed at a second end. The drive system further comprises a motor (5) which indirectly or directly rotates a screw nut (4), and to a lead screw (1) which is parallel to the fold axis of the bellows (2) and is linked to the bellows (2) on a first side of the closed end of the bellows (2), and wherein the screw nut (4) is arranged on the lead screw (1). The drive system also comprises a coupling rod (8) which is linked at a first end to a second side of the closed end of the bellows (6), and the coupling rod can be linked at a second end to a rotary shaft (9) which is to be driven eccentrically.