System and Method for Non-Contact Determination of an Electrical Potential of a Sample

Simple SummaryContent extracted from patent full text and abstract with AI.

The patent describes a system and method for contactlessly determining the electrical potential of a sample (such as a semiconductor or metal). The invention uses an actuator to induce bending vibrations in a flexible body with an attached electrode, which is positioned near the sample. By varying the distance between the vibrating electrode and the sample, an oscillating electrical signal is detected, allowing for precise measurement of both static and dynamic electrical potentials in the sample. The system can operate in various environments, including vacuum chambers, and is designed to minimize measurement errors caused by electromagnetic interference or mechanical damping.

Use CasesContent extracted from patent full text and abstract with AI.

• Non-contact measurement of electrical potentials in semiconductor devices during manufacturing quality control.
• Sensitive surface potential mapping of materials for research or defect analysis.
• Photovoltaic or optoelectronic device characterization to assess electronic properties without physical contact.
• Measurement of electrical properties in hazardous, fragile, or small samples where contact probes may cause damage or contamination.
• Inline testing or monitoring of samples inside a vacuum or controlled atmosphere environment.

BenefitsContent extracted from patent full text and abstract with AI.

• Enables non-invasive and damage-free measurement of electrical potential, preserving sample integrity.
• Capable of detecting both time-varying (dynamic) and constant (static) electrical potentials for comprehensive analysis.
• Minimized electromagnetic interference and mechanical disturbances for higher accuracy.
• Suitable for sensitive environments (e.g., vacuum, low pressure), expanding applicability to advanced material research and manufacturing.
• Reduces the need for probe contacts, avoiding contamination, wear, or alteration of delicate surfaces.
• Enables precise spatial resolution and flexibility through movable and adjustable electrode design.

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The invention relates to a system (100) for contactlessly ascertaining the electric potential of a sample (1). The system (100) - comprises an actuator unit (2) which is operatively connected to a bending body (3) along a first direction (11), wherein the bending body (3) is additionally operatively connected to a counter mass (4) which is resiliently or elastically suspended on the system (100), and the bending body (3) extends along an axis in a second direction (12) and has an electrode (5) which extends at least along the second direction (12), and - is designed such that the electrode (5) can be arranged opposite a sample (1) at a distance thereto along the first direction (11). The actuator unit (2) is designed to actuate the bending body (3) in order to produce a bending vibration about the axis with an adjustable frequency such that the distance between an arranged sample (1) and the electrode (5) varies over time by means of the bending vibration with the adjustable frequency such that an electric signal which varies over time can be detected in the electrode (5), said electric signal being used in order to ascertain the electric potential of the sample (1). The invention additionally relates to a method for contactlessly ascertaining the electric potential of the sample (1).