Compact and Modular Atmospheric Plasma Device for Generating Single Plasma Micro-filaments

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This patent discloses a compact, modular atmospheric plasma device capable of generating single plasma micro-filaments at atmospheric pressure. The device features a controller that regulates spark discharge using a DC-voltage-powered driver and a piezoelectric transformer, enabling precise control over plasma filament properties. The device operates without the need for a grounded counter-electrode and is designed for high precision, maskless surface treatments, such as etching, cleaning, activation, or thin-film deposition, on a wide range of materials—including non-conductive substrates. The system can be handheld or integrated into automated setups for advanced manufacturing applications.

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• High-resolution maskless etching and patterning of thin films for microelectronics and semiconductors.
• Precision cleaning, activation, and surface modification of materials in research or industrial settings.
• Deposition of polymers, metals, metal oxides, or hybrid films by plasma-assisted additive manufacturing or direct writing.
• Biomedical device fabrication or selective modification of surfaces, including those made from non-conductive materials.
• Microfluidic device production and prototyping of complex 3D or non-planar structures.
• Localized plasma treatment for sensors, microelectronic circuits, and photonic devices.
• Plasma-based writing or printing of conductive or dielectric patterns without masks or photoresists.

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• Compact and modular design allows for easy integration and portability, including handheld use.
• Eliminates the need for a grounded counter-electrode, enabling treatment of a broader range of materials (including non-conductive surfaces).
• Achieves micrometer and even sub-micrometer precision, supporting high-resolution processing and patterning.
• Support for maskless operations reduces material waste and speeds up prototyping—no need for traditional lithography masks.
• Versatile plasma control (via amplitude, frequency, and waveform) provides adaptability for various applications and process requirements.
• Interchangeable and verifiable nozzles or electrodes enhance flexibility and operational security.
• Operates at safe, low DC voltages (e.g., 3–24V), enabling battery-powered or plug-in operation.
• Modular integration with other advanced manufacturing processes (e.g., additive manufacturing, ALD, CVD, laser processing) expands its use cases.
• Safe operation features, such as insulating capillaries and protective housings, support user safety and device longevity.

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Inventors & Applicants

Patent Abstract

The invention relates to a transient spark discharge device (1) configured to generate an atmospheric pressure plasma filament (10) comprising the following components: - a controller circuit (2-1) connected to and configured to control - a DC-voltage-driven driver circuit (2-2) configured to generate a first signal at a first output (7), wherein the controller circuit is configured to control at least one signal property of the first signal, such as an amplitude, a frequency and/or a shape of the first signal, wherein the first output (7) is electrically connected to - a piezoelectric transformer (2-3), wherein the piezoelectric transformer is configured to generate a second signal at a second output (9), wherein the second output (9) is electrically connectable or connected to - a nozzle (3) comprising one or more electrically conductive electrodes (3-1) connectable or connected to the second output (9), wherein each electrode (3-1) comprises a conductive electrode tip (3-4), wherein each electrode comprises a hollow channel (3-2) with a first opening (3-2-1) at its electrode tip (3-4) and a second opening (3-2-2) at an opposite end of the channel (3- 2), such that a feed gas (8) may be flown from the second opening (3-2-2) to the first opening (3-2-1) for replenishing the feed gas (8) at the electrode tip (3-4), wherein the second signal is configured to cause a transient spark discharge at each electrode tip (3-4) of the one or more electrodes such as to generate a transient plasma filament (10) at each electrode tip (3-4).