Method and Apparatus for Generating an Expanding, Diffuse Microwave Plasma

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This patent describes a method and device for generating a widely spread, diffused plasma using microwaves. The invention utilizes a specially designed resonance circuit to efficiently ignite plasma at lower power levels, making the ignition system more resilient. Once ignited, the plasma is maintained and allowed to expand using a microwave field, resulting in a large, diffused plasma area.

Use CasesContent extracted from patent full text and abstract with AI.

• Surface treatment and sterilization in medical devices using plasma
• Material processing such as coating, cleaning, or etching in industrial applications
• Environmental applications like air or water purification with plasma technology
• Ignition systems for scientific experiments requiring stable, diffused plasmas
• Creation of plasma displays or advanced lighting solutions

BenefitsContent extracted from patent full text and abstract with AI.

• Enables plasma ignition with lower energy consumption, reducing operational costs
• Reduces wear and tear on ignition devices, increasing their lifespan
• Produces a more evenly distributed (diffused) plasma, which can be advantageous for processing large areas
• Provides safer and more controlled plasma generation
• Can be integrated into various industrial and scientific plasma applications

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Inventors & Applicants

Patent Abstract

The method involves causing a plasma ignition, in which a resonance circuit is dimensioned and arranged in such a manner that high resonance field intensity is attained with a lower power coupling for the plasma ignition to inherently protect an ignition device. The plasma ignited by a resonant ignition structure (3) is provided with energy over a surrounding microwave field such that spreading diffused plasma is produced. An independent claim is also included for a device for producing spreading diffused microwave plasma.