Method and Apparatus for Particle Detection

Simple SummaryContent extracted from patent full text and abstract with AI.

The invention describes a method and apparatus for detecting tiny particles in a liquid, such as ultra-pure water. It works by using a laser or excitation light to generate microscopic bubbles around the particles. These bubbles are then expanded by an ultrasonic wave, making them large enough to be detected optically (with a camera) or acoustically. This allows for accurate identification and quantification of extremely small and otherwise invisible particles in liquids.

Use CasesContent extracted from patent full text and abstract with AI.

• Quality control of ultra-pure water in semiconductor manufacturing to detect nano- and microparticles
• Detection of contaminants in pharmaceutical process liquids
• Monitoring cleanliness in laboratory or medical environments where sterile fluids are required
• Research applications requiring precise measurement of nanoparticle concentrations in suspensions
• Inline monitoring of process water in high-tech industries
• Detection and discrimination of different types of nanoparticles or nanobubbles in research and quality assurance

BenefitsContent extracted from patent full text and abstract with AI.

• Enables direct detection and counting of nanoparticles and even nanobubbles, including those too small to be seen with standard optical methods
• Provides greater accuracy and sensitivity than existing particle detection techniques
• Allows for both batch and continuous (inline) monitoring of liquids
• Can detect hydrophilic particles, such as silica or glass, which are invisible to pure acoustic detection methods
• Adaptable for different particle sizes and materials by tuning laser parameters, increasing versatility
• Supports automated image analysis and quantification, improving throughput and consistency
• Reduces the need for high magnification optics, enabling larger sample volumes to be analyzed per measurement

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The invention relates to a method for particle detection in liquid medium, wherein an excitation light is applied to the liquid medium, the excitation liquid generating a respective bubble around one or more particles. An ultrasonic wave is used in order to expand the size of the bubbles. The bubbles are then detected. The invention relates further to a corresponding apparatus.