Tracking Type Laser Interferometer for Objects with Rotational Degrees of Freedom

Publication: WO2012079875A1
Published: 2012-06-21
Family Size: 6
Granted: Yes (3/6)

Simple SummaryContent extracted from patent full text and abstract with AI.

This invention is a laser interferometer system designed to measure the differential position between two objects, where one object has rotational freedom (like a sphere or cylinder), without needing precise alignment. By using feedback from a reflecting sphere or cylinder, the system continually realigns itself so the measurement beam always points to the object's center, maintaining stable and precise measurement even when the object rotates or moves off-center. This system supports both homodyne and heterodyne interferometer technologies and enables highly accurate position measurements in all spatial dimensions.

Use CasesContent extracted from patent full text and abstract with AI.

  • Precision manufacturing for positioning and alignment of components with rotational parts.
  • Robotics and automation systems requiring accurate tracking of moving joints with rotational ability.
  • Calibration and testing of rotary actuators or gimballed platforms.
  • Scientific experimentation involving precise movement and measurement of spherical or cylindrical samples.
  • Optical component alignment in high-resolution microscopy or lithography tools.
  • Aerospace and defense, where accurate tracking of gyros, rotors, or other rotating assemblies is essential.

BenefitsContent extracted from patent full text and abstract with AI.

  • Maintains high-accuracy position measurement even when the object rotates or is not perfectly aligned with the rotation axis.
  • Allows for real-time tracking of both longitudinal and transversal movement in sub-micron and sub-nanometer ranges.
  • Applicable to objects with rotational freedom, expanding the range of measurable geometries.
  • Reduces need for precise initial alignment, simplifying setup and operation.
  • Compatible with both homodyne and heterodyne interferometers, increasing versatility.
  • Enables feedback-based tracking and automatic realignment, improving reliability and performance in dynamic conditions.

Technical Classifications (CPCs)

Main Classifications

Physics & Measurement

Sub Classifications

Measuring & Testing

CPC Codes

G01B9/02001G01B9/02029G01B11/005G01S17/66

Inventors & Applicants

Applicants

Scherrer Inst Paul

Holler Mirko

Raabe Joerg

Patent Abstract

The method relates to the differential position measurement by laser interferometry of two elements while offering a rotational degree of freedom to one of the elements using a reflecting sphere as mirror for the laser beam. The method does not require this object to be aligned with the rotation axis, but instead can track the object in off-centered geometries. This is achieved by employing the pointing of the reflected beam from this sphere as feedback signal to realign the interferometer which then has a constant beam pointing to the center of the sphere in all cases. The method keeps the direction of the measurement constant. The method is suitable to homodyne and heterodyne types of laser interferometers technology.

Key Information

Publication No.

WO2012079875A1

Family ID

45001729

Publication Date

2012-06-21

Application No.

EP2011069977W

Application Date

2011-11-11

Priority Date

2010-12-13

Granted

Yes (3/6)

Possible Cooperation

For further information please contact the transfer office.