A Method for Manufacturing a Hall Sensor Assembly and a Hall Sensor Assembly

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This invention relates to a new method for constructing a highly accurate, miniaturized three-axis Hall sensor assembly for measuring magnetic field vectors. The assembly comprises multiple Hall sensors, each oriented to a different Cartesian direction, placed adjacently so their active sensing areas are concentrated within a very small common volume (≤ 200 μm x 200 μm x 200 μm). This design allows averaging of the output to assign all three vector components to the same precise spatial point, enabling real-time, accurate measurement of the full magnetic field vector and reducing errors typical in existing three-axis Hall sensors.

Use CasesContent extracted from patent full text and abstract with AI.

• Precision magnetic field mapping in scientific research and particle accelerators
• Position and movement sensing in industrial automation systems
• 3D magnetic field measurement in medical equipment (such as MRI or proton therapy devices)
• Non-destructive testing and quality inspection for materials with complex magnetic properties
• Navigation and orientation sensing in robotics and aerospace systems
• Calibration reference for other magnetic field sensors or systems

BenefitsContent extracted from patent full text and abstract with AI.

• Significantly improved measurement accuracy of three magnetic field components at a single point in space and time
• Miniaturized sensor volume reduces spatial averaging errors, especially in non-linear and complex magnetic fields
• Cancels out undesirable planar Hall effects to further enhance measurement precision
• Flexible manufacturing: supports both pyramidal and cuboid assembly designs for easier integration, assembly, or cost optimization
• Applicable in environments requiring low interference, since support materials are non-magnetic and non-conductive
• Provides real-time, instantaneous full-vector magnetic field readout

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Patent Abstract

An assembly (2) of Hall sensors (6) provides the advantages: the three averaged values for the magnetic field components are assigned to the same point in space, at the centre (4) of the Hall sensor assembly (2), thus allowing for instantaneous measurements of the full field vector; with the appropriate electrical connections of the Hall elements from opposing surfaces of each pair, the undesired planar Hall effect can be practically cancelled out.