Silicon Carbide Detectors with Improved Reliability for Photon And/or Ion Beams

Publication: EP3614413A1
Published: 2020-02-26
Family Size: 2
Granted: No

Simple SummaryContent extracted from patent full text and abstract with AI.

This invention relates to improved silicon carbide (SiC) detectors for photon and ion beams, specifically aimed at X-ray beam position monitors (XBPMs) used in high-intensity environments such as synchrotrons. The new design integrates a carbon-based layer, like Diamond-like Carbon (DLC), graphite, or graphene, as a heat sink or protective layer on or near the SiC membrane and electrodes. This configuration effectively reduces the heat load and operating temperature of the detector without sacrificing the superior electrical performance and transparency of SiC.

Use CasesContent extracted from patent full text and abstract with AI.

  • Synchrotron facilities for high-intensity X-ray beam monitoring and positioning.
  • Free electron laser (FEL) systems requiring robust, transparent beam monitors.
  • Medical particle accelerators (cyclotrons) for monitoring ion therapy beams.
  • Industrial or research applications involving real-time monitoring of high-flux photon or ion beams.
  • Scientific experiments demanding accurate, temperature-stable beam diagnosis.

BenefitsContent extracted from patent full text and abstract with AI.

  • Significantly improved thermal management of SiC detectors, reducing the risk of overheating and degradation under intense beams.
  • Maintains high beam transparency and electrical performance compared to traditional diamond detectors.
  • More cost-effective and scalable manufacturing (e.g., with DLC) than conventional diamond coating methods.
  • Enhances the operational lifetime and reliability of beam position monitors at high power densities.
  • Flexibility: Carbon-based heat sinks can be tailored (choice of DLC, graphite, or graphene) to further optimize transparency, protection, and electrical functions.

Technical Classifications (CPCs)

Main Classifications

Electrical & Electronic Tech

Physics & Measurement

Sub Classifications

Electric Elements

Measuring & Testing

Semiconductor & Solid-State Devices

CPC Codes

G01T1/26G01T1/29H01J37/244H10F30/301H10F77/1226H10F77/30H10F77/60

Inventors & Applicants

Applicants

Scherrer Inst Paul

Patent Abstract

It is the objective of the present invention to achieve a reduction of the heat load (i.e. operating temperature) of Silicon Carbide X-ray detectors, more specifically of X-ray beam position monitors (XBPMs), under high intensity beams, e.g. pink and white beams at SLS.This objective is achieved according to the present invention by a photon and/or ion beam position detector (XBPM), comprising:a) a substrate (2);b) an electrically active membrane (4) being supported by the substrate (2) wherein the electrically active membrane (4) is substantially made from Silicon Carbide;c) a number of electrodes (8 to 12) being disposed on the substrate (4) and on the electrically active membrane (4); the electrodes (8to 12) being connected to a driving and current measuring circuitry (14), thereby allowing a current to flow upon activation by the x-ray and/or the ion beam through the electrically active membrane (4);andd) a carbon based layer (18, 20) that is disposed at least partially on the surface of the electrically active membrane (4) and/or at least partially on the surface of the number of electrodes (8 to 12).By the separation of the electrically active area of the XBPM from the heat sink regions realized with the carbon based layer, the detector achieves a reduction of the heat load and maintains the advantages provided by the use of a SiC electrically active membrane.

Key Information

Publication No.

EP3614413A1

Family ID

63405035

Publication Date

2020-02-26

Application No.

EP18190666A

Application Date

2018-08-24

Priority Date

2018-08-24

Granted

No

Possible Cooperation

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