A Multi-Undulator Spiral Compact Light Source

Simple SummaryContent extracted from patent full text and abstract with AI.

This patent describes a compact, spiral-shaped light source using multiple (three or more) interconnected electron storage rings with undulators for generating high-brilliance, coherent light, especially in the extreme ultraviolet (EUV) range. The unique spiral configuration allows multiple insertion devices in a small footprint, reduces component duplication, and increases overall light output efficiency. Supporting systems, like a booster and linear accelerator, are incorporated to maintain stable beam intensity and operational efficiency in limited space.

Use CasesContent extracted from patent full text and abstract with AI.

• Actinic mask inspection in semiconductor manufacturing (especially EUV photolithography)
• High-resolution metrology and imaging applications requiring coherent EUV/X-ray light
• Scientific research in materials science, biology, and nanotechnology using synchrotron radiation
• Development and testing of optical components for the EUV range
• Compact laboratory-scale synchrotron sources for universities or research institutions
• Non-destructive testing and quality control of micro- and nano-structured surfaces

BenefitsContent extracted from patent full text and abstract with AI.

• Significantly reduces required floor space, enabling installation in standard laboratory environments
• Allows multiple light sources (undulators) in a single, compact system, increasing versatility and throughput
• Higher overall light output (central cone power) compared to separate compact sources—can be up to 5 times higher
• Reduces duplication of expensive components, lowering system cost and simplifying maintenance
• Continuous 'top-up' injection ensures stable and high-intensity beam performance
• Alleviates current-limiting effects like ion trapping, supporting higher average electron beam currents
• Flexible design suitable for various wavelength ranges and scientific applications

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Inventors & Applicants

Patent Abstract

It is the objective of the present invention to provide a compact and cost effective light source with a small foot print that can host more than one insertion device. Exemplarily –but not limited to –a compact source for metrology application in the EUV range, in particular optimized for actinic mask inspection using coherent scattering methods, is presented. This objective is achieved according to the present invention by a compact light source based on electron beam accelerator technology, where three (but not limited to) storage rings are connected in a spiral configuration that provides three plane straight sections for the implementation of insertion devices. A compact multi-bend magnet structure is used for the storage ring to generate a small emittance leading to high brilliance and large coherent content of the light. A booster is continuously feeding the storage ring by top-up injection and keeping in this way the intensity of the electron beam stable down to a level of 10-3. The booster is located on a level below the spiral storage ring and receives the electron beam from a linear accelerator positioned in the central area of the booster. These measures result in a sufficiently compact source that fits into conventional laboratories or their maintenance areas and is designed to have a footprint being about 50 m2. In addition to space saving, there are numerous other advantages compared to a concept with 3 separated compact sources. Major systems are only required once, as injection, RF-acceleration, beam manipulating devices and large size diagnostics. Higher average currents can be stored in such a spiral configuration which enhances the overall central cone power. In a small compact source the number of bunches is limited by ion trapping and therefore a large gap is needed to clear the ions. For the same gap length the average current is increased in the spiral configuration. Therefore the gain in central cone power is not only tripled but increased by a factor of 5, assuming a gap size of half the single storage ring circumference.