Field Emission Cathode Structure and Driving Method Thereof

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The invention relates to a novel field emission cathode structure using a field emitter array with two stacked control electrodes (an extraction gate and a collimation electrode) and an improved driving method. By applying precise voltage pulses to these electrodes, the invention enables the creation of short, highly collimated electron pulses with high brightness and reduced divergence. The structure is designed to simplify electrical connections and enable precise and flexible control of electron beam characteristics, outperforming previous designs that were more complex or less efficient.

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• X-ray sources for medical imaging or non-destructive testing that require short, high-brightness, focused electron pulses.
• Free-electron lasers for scientific research needing precisely controlled electron pulses.
• Microwave vacuum electronic amplifiers and oscillators requiring efficient and stable electron emitters with low power dissipation.
• Electron beam lithography or microscopy where highly collimated beams improve resolution and throughput.
• Particle accelerators or electron guns where adjustable pulse duration and beam brightness are crucial.
• Sensors and detectors in scientific instruments relying on finely controlled electron emission.
• High-speed, high-frequency electronic devices where fast electron switching is required.

BenefitsContent extracted from patent full text and abstract with AI.

• Enables generation of highly collimated, short-duration electron pulses with reduced emission angle and high brightness.
• Simplifies the cathode structure and electrical connections, reducing complexity compared to previous designs requiring multiple independent voltages and contacts.
• Offers flexible and precise control of electron beam characteristics (brightness, emission angle, pulse duration) through voltage pulse manipulation.
• Facilitates higher reliability and potentially lower power dissipation compared to earlier approaches with resistive dividers.
• Operable across diverse environments, from low to high acceleration electric fields, broadening application suitability.
• Reduces stray emissions and improves efficiency by ensuring most generated electrons contribute to the beam.
• Adaptable to large-scale fabrication using robust materials such as molybdenum and silicon-based resistors, enhancing manufacturability and device longevity.

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Patent Abstract

The present invention describes a field-emitter array cathode structure with two stacked control electrodes and their driving method to produce short electron pulses. A sequence of electric stimuli applied to the field emitter array drives generates an electron beam with precisely controlled emission angle, allowing for the production of short collimated electron pulses with high electron beam brightness.