Device for converting a first motion into a second motion responsive to said first motion under a demagnification scale

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This invention is a flexure-based mechanical device that precisely converts a relatively large input movement into a significantly smaller, but highly accurate, output movement. The device achieves this with a linear demagnification factor (up to 1:1000) and avoids common issues like nonlinearity, friction, hysteresis, and drift found in traditional mechanical or piezoelectric actuators. It uses specially shaped and offset flexure blades to ensure the output motion is directly proportional to the input over the full operating range, enabling precise nanometer-scale positioning.

Use CasesContent extracted from patent full text and abstract with AI.

• Precision positioning in scientific instruments such as interferometers for X-ray or optical experiments
• Microscale and nanoscale manipulation tools for nanotechnology research
• Assembly tools for microelectronics, MEMS, and MOEMS manufacturing
• Any application requiring accurate, drift-free reduction of mechanical motion, such as microscopy stages
• Fine adjustment mechanisms in metrology equipment
• High-precision scanning in semiconductor wafer inspection

BenefitsContent extracted from patent full text and abstract with AI.

• Provides extremely high precision, achieving nanometer-level accuracy from micrometer-range input movements
• Maintains linear, constant demagnification across the entire range, improving predictability and control
• Eliminates problems with friction, hysteresis, and drift typically associated with mechanical and piezoelectric actuators
• Simple, robust monolithic design minimizes assembly requirements and potential sources of error
• Tunable demagnification factor allows adaptation to various applications and performance requirements
• Can be manufactured using various techniques (such as wire EDM, laser cutting), allowing flexibility in implementation and materials

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Patent Abstract

The present invention discloses a device (CD) for converting a first motion (x s ) into a second motion (”y) responsive to said first movement (x s ) under a demagnification scale (i), comprising: a) an input portion (IP) being drivable in a rectilinear translation in a first direction (x) by an actuator (AC) causing said first motion (x s ); b) an output portion (OP) being movable by a converting blade (CB) causing said second motion (”y) responsive to said first motion (x s ) in a second direction (y) substantially perpendicular to said first direction (x); and c) a converting section (CS) connecting said input portion (IP) to said output portion (OP); said converting section (CS) comprising an intermediate spring portion (ITP) and the converting blade (CB), c1) wherein said intermediate spring portion (ITP) comprises at least two parallel flexure blades (FB1, FB2); and c2) wherein said converting blade (CB) being substantially identical in shape to the a least two parallel flexure blades (FB1, FB2) and being offset from its neutral position by a predetermined amount (x 0 ) in the first direction (x) as compared to the neutral position of the at least two parallel flexure blades (FB1, FB2). This device has a flexure-based structure that allows combining the advantages of classical actuators with accuracies in the micrometer range and the advantages of flexures to achieve nanometer accuracy.