Method for Producing Textures, Structures or Polishes on the Surface of Silicon

Publication: DE102022122705A1
Published: 2024-03-07
Family Size: 1
Granted: No

Simple SummaryContent extracted from patent full text and abstract with AI.

This patent describes a method for creating textures, structures, or polish finishes on the surface of silicon by using an etching process. The silicon surface is treated with an etching solution that contains at least hydrofluoric acid (HF) and bromine (Br2), and possibly water or aqueous mixtures, to achieve the desired surface modifications.

Use CasesContent extracted from patent full text and abstract with AI.

  • Manufacturing textured or polished silicon wafers for solar cells to improve light absorption
  • Producing finely structured silicon surfaces in the semiconductor industry for microelectronics
  • Creating custom surface properties on silicon components in sensors or MEMS devices
  • Enhancing the appearance or functional surfaces of silicon in optoelectronic devices

BenefitsContent extracted from patent full text and abstract with AI.

  • Enables precise control over the texture and polish of silicon surfaces
  • Improves efficiency and performance of silicon-based devices, such as solar cells
  • Allows for more flexible and varied surface engineering compared to traditional methods
  • May reduce production costs by streamlining the surface treatment process

Technical Classifications (CPCs)

Main Classifications

Electrical & Electronic Tech

Sub Classifications

Electric Elements

CPC Codes

H01L21/30604H01L21/30608

Inventors & Applicants

Applicants

Technische Univ Bergakademie Freiberg Koerperschaft des Oeffentlichen Rechts

Patent Abstract

Es werden verschiedene Aspekte von Ätzlösungen und Verfahren zur Erzeugung von Texturen, Strukturen oder Polituren auf einer Oberfläche von Silizium beschrieben. Dabei kann die Siliziumoberfläche einem Ätzprozess mittels eines wasserhaltigen oder wässrigen Gemischs als Ätzlösung unterworfen werden, wobei die Ätzlösung zumindest Flusssäure (HF) und Brom (Br2) aufweist.

Key Information

Publication No.

DE102022122705A1

Family ID

89905677

Publication Date

2024-03-07

Application No.

DE102022122705A

Application Date

2022-09-07

Priority Date

2022-09-07

Granted

No

Possible Cooperation

For further information please contact the transfer office.