Sensor Unit

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This invention describes a sensor unit designed for the precise measurement of variables (such as pressure or temperature) in aggressive liquid or gaseous environments. The sensor combines a robust, miniaturizable construction with improved resistance to harsh media and mechanical stress. Key features include a sensor capsule with a measurement opening, a sensor region with measurement electronics, and an innovative through-hole (plated-through hole) in the base, which electrically connects the front-facing measurement electronics to supply lines at the rear, allowing for more compact, reliable, and vibration-resistant assembly. The design omits fragile wire bonds, avoids unwanted signal interference, and is suitable for high-temperature conditions.

Use CasesContent extracted from patent full text and abstract with AI.

• Monitoring pressure or temperature in automotive engines (e.g., oil pressure sensors in combustion engines).
• Measuring pressure or temperature in turbines, especially gas turbines operating at high temperatures.
• Hydraulic and pneumatic tools that require robust sensors in chemically or mechanically aggressive fluids.
• Industrial process control in chemical plants or refineries, where sensors face harsh environments.
• Precision climate control systems needing reliable, contamination-resistant pressure or temperature sensors.
• Differential pressure monitoring (for example in HVAC or filter systems) using reference channels.

BenefitsContent extracted from patent full text and abstract with AI.

• Highly resistant to aggressive chemicals, contaminants, and high temperatures, increasing sensor durability.
• Miniaturized design enables use in space-limited environments and supports batch manufacturing (lowering costs).
• No fragile wire bonds—reduces failure risk due to vibration or mechanical stresses (increases reliability).
• Improved measurement accuracy by decoupling from external mechanical/thermal influences.
• Allows for direct exposure of only inert silicon to harsh media, minimizing risk of corrosion or signal interference.
• Compatible with established semiconductor techniques (e.g., SOI technology), supporting scalability and customization.
• Versatile for both absolute and relative (differential) pressure measurements, including ability to withstand aggressive reference media.

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The invention relates to a sensor unit for measuring a measurement variable in a medium (2), in particular in an aggressive liquid or gaseous medium (2), said unit comprising a sensor (4) which is arranged in a sensor capsule (3) and has a sensor region (6) which is arranged on a base body (5), wherein, in order to detect the measurement variable in the sensor region (6), a measurement opening (7) is provided in the sensor capsule (3). On a side facing the measurement opening (7), the sensor region (6) has a measurement surface (9) which is provided with measurement electronics (8), wherein an electrical supply line (10) is provided on the sensor (4) for the purpose of transmitting a sensor signal which is generated by the measurement electronics (8). According to the invention, a plated-through hole (11) is provided in the base body (5), which plated-through hole is used to connect the measurement electronics (8) to the electrical supply line (10) via signals through the base body (5), on a base side (12) of the sensor (4) which faces away from the measurement opening (7).