Micromechanical component with a mirror and its manufacturing method

Simple SummaryContent extracted from patent full text and abstract with AI.

This patent describes a micromechanical component featuring a tiltable mirror, suitable for deflecting electromagnetic radiation such as light or lasers. The mirror plate can tilt along multiple axes, using a carefully designed spring and frame system for precise movement. The tilting is controlled by electrostatic comb electrodes or a piezoelectric actuator, allowing high-frequency, low-distortion operation even with relatively large mirrors. The invention also includes a special method for manufacturing the component to enhance performance and reliability.

Use CasesContent extracted from patent full text and abstract with AI.

• Laser beam scanning for projection displays (e.g., compact projectors, heads-up displays)
• Optical scanning for imaging systems such as confocal microscopes and endoscopes
• Barcode readers and laser-based measurement devices
• Miniaturized cameras and imaging sensors for medical or industrial inspection
• Adaptive optical devices in communication systems

BenefitsContent extracted from patent full text and abstract with AI.

• Enables high-frequency, multidirectional tilting of the mirror with minimal deformation, allowing precise and fast beam deflection.
• Supports large mirror sizes while maintaining low inertia and high scanning speeds, improving image quality and device throughput.
• Reduces image distortions (such as line distortion) through compensation mechanisms built into the spring and coupling structures.
• Eliminates or minimizes issues associated with electromagnetic actuation—making the device more compact, energy-efficient, and less heat affected.
• Can be manufactured with proven microfabrication techniques, fostering integration into compact, low-cost products.

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The component (100) has a mirror plate (1) tiltable in several axles, and a reinforcement frame (6) provided around the plate. The frame is coupled with the plate and component frame (12) by a horizontal spring (3) and a vertical spring (8), respectively. Electrostatic comb electrodes (9, 10) or a piezoelectric drive element control tilting movements of the plate. A mirror reinforcement and coupling element (5) provided at a rear side of the plate is coupled with the reinforcement frame by the horizontal spring. A predominant part of the horizontal spring is partly covered by the plate. An independent claim is also included for a method for manufacturing a micromechanical component for deflecting electromagnetic radiation.