MEMS Vacuum Sensor Based on the Friction Principle

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The invention relates to a MEMS (Micro-Electro-Mechanical Systems) vacuum sensor based on the friction principle. It consists of a pressure sensor element with a mass suspended above a substrate, allowing it to oscillate. The design features specific recesses or bushings on the substrate to reduce the damping by the gas or plasma, improving sensitivity and measurement range. The sensor detects pressure by analyzing how the oscillations of the mass decay, enabling highly sensitive measurements across a large pressure range, from deep vacuum (10⁻⁶ mbar) up to atmospheric pressure.

Use CasesContent extracted from patent full text and abstract with AI.

• Monitoring vacuum pressure in semiconductor manufacturing equipment.
• Controlling vacuum levels in material coating and treatment processes.
• Ensuring proper vacuum in pharmaceutical and food packaging systems.
• Pressure sensing for quality control in scientific instruments and laboratory equipment.
• Integration in compact, portable vacuum sensing devices for industrial and field applications.
• Real-time vacuum monitoring in plasma or gas processing chambers.

BenefitsContent extracted from patent full text and abstract with AI.

• Wide measurement range covering ultra-high vacuum to atmospheric pressure with a single sensor.
• High sensitivity and accuracy, with deviations below 5% across the range.
• Compact MEMS design allows for miniaturization and easy integration in diverse environments.
• Reduced energy losses and increased oscillation quality factor, enabling reliable readings, even at high or low pressures.
• Works at high operating temperatures (up to 350°C), suitable for harsh industrial processes.
• Simple electrostatic actuation and detection mechanism simplifies electronics and reduces costs.
• Robust against external vibrations and disturbances for reliable operation in industrial settings.

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Patent Abstract

The invention relates to a pressure-measuring sensor element having a substrate (5) and at least one mass element (1) which is arranged at a distance from the substrate (5) and is connected to the substrate (5) and/or a support body (6), which cannot move relative to the substrate (5), such that it can oscillate, with the result that a gap whose width can be varied by oscillations of the mass element (1) exists between the mass element (1) and the substrate (5). At least one depression and/or at least one bushing, which is used to reduce the damping of the oscillation of the mass element by the gas or plasma surrounding the mass element (1), is/are situated in that area of the substrate (5) which borders the gap. The sensor element is used, in particular, in pressure sensors for measuring pressures in the vacuum area. Maximum pressures into the range of atmospheric air pressure can be detected using the sensor element according to the invention as a pressure sensor. The lowest pressures to be determined are in the range of 10-6 mbar.