Micromechanical Ultrasonic Transducer

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This invention relates to a micromechanical ultrasound transducer (often referred to as a MEMS ultrasound transducer) with a grid-like arrangement of base cells. Each base cell includes at least one electrode and an electromechanical transducer element, and these cells are arranged on a substrate to form a chip. The base cells are electrically isolated at the substrate level, and the device is defined at the edges by separation lines on the substrate.

Use CasesContent extracted from patent full text and abstract with AI.

• Medical imaging devices, such as ultrasound scanners
• Non-destructive testing and inspection of materials
• Industrial process control using ultrasonic measurements
• Biomedical devices requiring high-resolution ultrasound sensing
• Portable or miniaturized ultrasound diagnostic tools

BenefitsContent extracted from patent full text and abstract with AI.

• Allows for compact, high-density ultrasound transducer arrays
• Improved resolution and sensitivity for imaging or detection applications
• Can be produced using microfabrication (MEMS) techniques, enabling low-cost, scalable manufacturing
• Electrical isolation of cells at the substrate enables more flexible design and better signal quality
• Applicable to both medical and industrial fields, increasing versatility

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

Mikromechanischer Ultraschallwandler, dadurch gekennzeichnet, dass der mikromechanische Ultraschallwandler mehrere zumindest teilweise rasterförmig angeordnete miteinander kontaktierte, mindestens eine Elektrode und mindestens einen elektromechanischen Wandler aufweisende Basiszellen aufweist, wobei eine Vielzahl von Basiszellen auf einem Substrat angeordnet sind und einen Chip bilden, wobei die Basiszellen auf Substratebene nicht miteinander verbunden sind und dass der mikromechanische Ultraschallwandler durch wenigstens eine Vereinzelungslinie randseitig begrenzt ist.