Micromechanical Device with a Semiconductor Arrangement for Emission and Detection of Electromagnetic Radiation

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This patent describes a highly compact micromechanical scanning device that integrates both electromagnetic radiation emitters (like lasers, LEDs, or quantum dots) and detectors (such as photodetectors, quantum dot sensors) onto a movable carrier plate. The plate can be precisely moved in one or more dimensions by piezoelectric actuators for the purpose of scanning, directing, or receiving light. The design enables efficient, high-resolution imaging or measurement while reducing the complexity and size typical in optical systems like microscopes and LIDAR sensors. The entire system can be fabricated using semiconductor manufacturing processes, leading to highly miniaturized and integrated optoelectronic systems.

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• Confocal or fluorescence microscopy for biological and medical imaging
• LIDAR sensors for autonomous vehicles, robotics, and industrial automation
• Optical scanners for barcode or QR code reading
• Miniaturized imaging devices for endoscopy or medical diagnostics
• High-resolution 3D scanning and surface profiling
• Optical communication systems requiring precise beam steering
• Sensing or monitoring in Internet of Things (IoT) devices

BenefitsContent extracted from patent full text and abstract with AI.

• Significant reduction in device size and complexity due to high integration of optics and mechanics
• Improved precision and reproducibility in alignment and positioning of emitter and detector elements
• Lower manufacturing costs and easier assembly through semiconductor fabrication techniques
• Enhanced spatial (and potentially spectral) resolution for imaging applications
• Potentially lower power consumption due to efficient piezoelectric actuation
• Robustness and reliability from minimized need for manual adjustment or calibration
• Flexible design enables adaptation to a variety of wavelengths and application requirements

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Patent Abstract

The invention relates to a scanning device having a transmitting arrangement (20) for transmitting signals in the form of electromagnetic radiation and/or having a receiving arrangement (30) for receiving signals in the form of electromagnetic radiation, wherein the scanning device has a micromechanical device having a carrier plate (4), which is held on a frame (1) by means of spring elements (2a, 2b, 2c, 2d), and having a drive device (2a, 2b, 2c, 2d, 11a, 11b, 11c, 11d), which is configured to drive the carrier plate relative to the frame, wherein the carrier plate has a transmitting arrangement (20, 30) and/or a receiving arrangement (20, 30), and wherein the drive device (2a, 2b, 2c, 2d, 11a, 11b, 11c, 11d) has piezoelectric drive elements which are directly connected to one of the spring elements in each case, or are part of one of the spring elements.