Method and Apparatus for Selective Modification of Layer Morphology in Superconductors

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This invention provides a method and apparatus for locally transforming and structuring thin films of superconducting materials. The process involves depositing a thin, non-superconducting (ceramic or insulating) layer onto a substrate, then applying localized heat to selected regions of the film. These heated regions undergo a phase transition and become superconducting, forming electrically isolated superconducting structures directly within the non-superconducting matrix—without the need for traditional etching or laser ablation methods.

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• Manufacturing micro- and nano-scale superconducting circuits for quantum computers and superconducting electronics.
• Fabrication of superconducting sensors, SQUIDs (superconducting quantum interference devices), and detectors with improved definition and reliability.
• Production of large-area superconducting wafers or panels for power electronics, energy transmission, or magnetic resonance imaging (MRI) systems.
• Development of scalable superconducting interconnects and patterns for telecommunications and cryoelectronic applications.
• Integration of superconducting structures into 3D substrates or other advanced electronic components.

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• Avoids damage and degradation associated with traditional structuring methods such as chemical etching or laser ablation, thus preserving superconducting properties.
• Reduces the complexity and number of process steps by combining patterning and phase conversion into a single local heating operation.
• Allows for high precision and flexibility in defining superconducting patterns, adaptable to various substrate materials and geometries (including 3D surfaces).
• Scalable for large-area and industrial applications, not limited to small chips.
• Enables the creation of electrically isolated superconducting regions directly within thin films, improving device reliability and performance.
• Applicable to a wide range of superconducting materials, including high-temperature, metallic, amorphous, or crystalline superconductors.

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Patent Abstract

The invention relates to a method for local phase transition and structuring of thin films made of superconducting materials, the method comprising the following steps: depositing a thin film (1) made of a superconducting material in a ceramic or insulating phase on a carrier substrate (2) in a deposition system (3); locally applying heat to the thin film (1), wherein regions of the thin film (1) are heated and undergo a phase transition into a superconducting phase (8) so that regions of the superconducting phase (8) form structures that are embedded in the insulating phase.