Sensor for Measuring Two Characteristics of a Gas

Simple SummaryContent extracted from patent full text and abstract with AI.

This invention relates to a nanomechanical sensor designed to simultaneously measure two distinct properties of a gas, such as gas pressure and particle mass or the partial pressures of different gas components. The sensor uses a prestressed nanomechanical membrane that vibrates in the presence of the gas. By analyzing the vibration behavior (frequency and damping) of the membrane, two independent gas properties can be determined with high precision across a wide range of pressures and temperatures. The sensor features a special microstructure that allows gas exchange and optimizes sensitivity and accuracy.

Use CasesContent extracted from patent full text and abstract with AI.

• Monitoring gas composition and pressure in scientific vacuum chambers, including ultra-high vacuum environments
• Environmental monitoring of air quality, including detection of particular gases and their concentrations
• Industrial process control where real-time analysis of specific gas components and their pressures is critical
• Leak detection in closed gas systems by measuring small changes in partial pressures
• Cryogenic gas monitoring for research or industrial storage applications
• Quality control in gas generation or mixing processes by measuring component partial pressures
• Integration into MEMS or microchip platforms for portable or embedded applications

BenefitsContent extracted from patent full text and abstract with AI.

• Simultaneous measurement of two independent gas properties with a single sensor
• Operates over an extremely wide range of pressures (from ultra-high vacuum to high pressure) and temperatures (from cryogenic to >300°C)
• High sensitivity and precision, even for very low gas pressures or in harsh environments
• Suitable for compact and miniaturized designs, enabling integration into small-scale devices
• Can be configured for optical or electronic readout, enhancing flexibility for different applications and environments
• Reduces the need for multiple sensors, lowering system complexity and cost
• Can detect both total and partial gas pressures, offering more detailed gas analysis than conventional sensors

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The invention presents and claims a sensor for simultaneously measuring two properties of a gas with a nanomechanical, prestressed measuring membrane. The measuring membrane extends in a membrane plane which extends at a coupling distance from and parallel to a coupling surface and is in contact with the gas. A coupling volume between the measuring membrane and the coupling surface is connected to an environment of the sensor via at least one exchange opening, such that gas can be exchanged between the coupling volume and an environment of the sensor through the at least one coupling opening. The coupling distance has been chosen such that the two properties of the gas can be determined from a vibration behavior of the measuring membrane.