Cantilever of a Scanning Probe Microscope

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This patent describes an advanced cantilever design for scanning probe microscopes, such as atomic force microscopes (AFM). The cantilever is made from a piezoelectric material (e.g., quartz) and is equipped with two sets of electrical contacts. One set of contacts can receive an electrical signal to make the cantilever vibrate (self-excitation), while the second set detects changes in the cantilever's electrical properties (self-detection) as it interacts with a sample. This integrated design eliminates the need for separate external components to drive oscillation and measure deflection, simplifying the microscope's construction and improving measurement accuracy.

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• High-resolution surface imaging in atomic force microscopy (AFM) for materials science, biology, and nanotechnology.
• Scanning probe microscopy in industrial quality control and failure analysis of micro- and nanoscale devices.
• Characterization of mechanical, electrical, and magnetic properties of surfaces at the nanoscale.
• In-situ analysis of samples in challenging environments such as liquids or reactive gases, enabled by the cantilever's electrical isolation.
• Simplified and more robust AFM instrument design for teaching laboratories and research facilities.

BenefitsContent extracted from patent full text and abstract with AI.

• Eliminates the need for separate external oscillators and detectors, greatly simplifying the setup and alignment of scanning probe microscopes.
• Enhances measurement sensitivity and accuracy by integrating self-excitation and self-detection into the cantilever itself.
• Reduces setup complexity and time, making the instruments more accessible for routine use or by less-experienced personnel.
• Enables robust operation in various environments, including liquids and reactive gases, due to electrical isolation.
• Supports both bending and torsional vibration detection, increasing the range of measurable sample properties.
• Utilizes readily available and well-known materials (like quartz), supporting straightforward manufacturing and cost-effective production.

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Inventors & Applicants

Patent Abstract

The invention relates to a cantilever (15) of a scanning probe microscope (10) having a scanning tip (16). In addition, the invention relates to a scanning probe microscope (10), in particular an atomic force microscope (10), and to a method for operating a scanning probe microscope (10), in particular an atomic force microscope (10), wherein a sample (12) is sensed in the form of a grid using a scanning tip (16) which is arranged on a cantilever (15). The invention also relates to the use of a cantilever (15). The cantilever (15) is distinguished by the fact that the cantilever (15) comprises a piezoelectric body (30) and the piezoelectric body (30) is provided with a first pair of electrical contacts (26, 31, 32, 35, 36) and a second pair of electrical contacts (27, 32, 33, 37, 38), wherein a first electrical variable has been or is applied to the input of the piezoelectric body (30) via the first pair of electrical contacts (26, 31, 32, 35, 36), and wherein a characteristic property of the piezoelectric body (22) has been or is sensed at the output with the aid of detected electrical currents via the second pair of electrical contacts (27, 32, 33, 37, 38).