Microtips and Nanotips, and Method for Their Production

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This patent describes a new method for producing micro- and nano-sized needle-shaped tips (microtips and nanotips) using chemical growth processes. Unlike traditional lithographic and etching methods, which require multiple steps and hazardous chemicals, this invention enables the formation of such tips by bringing a liquid or viscous precursor material into contact with a substrate (matrix) and then triggering chemical reactions by energy activation (thermal or photolytic). The resulting tips can be used for various high-precision applications and can be made from a variety of elements and compounds, especially silicates. The process is more cost-effective, safer, and simpler than conventional methods.

Use CasesContent extracted from patent full text and abstract with AI.

• Tips for atomic force microscopy (AFM), scanning probe microscopy (SPM), and scanning near-field optical microscopy (SNOM) as sensitive sensors.
• Writing and reading optical or magnetic data storage devices with micro- or nanoscale probes.
• Mold, stencil, or master structures for imprinting or micromachining soft materials (e.g., pressing, stamping, scribing, drilling, creating via-holes).
• Microelectrodes for emitting electron beams (e.g., field electron microscopy) or use in micro fuel cells and electrolytic cells.
• Crystallization points for controlled nucleation in material sciences.
• Components in micro-actuators, including spacers or filters for microfluidic or MEMS devices.
• Creation of functional surfaces, such as lotus-effect (self-cleaning) surfaces to reduce adhesion or surface tension.

BenefitsContent extracted from patent full text and abstract with AI.

• Reduces the number of production steps and avoids hazardous, corrosive chemicals (e.g., no need for hydrofluoric acid), increasing safety and environmental compatibility.
• Enables cost-effective mass production of micro- and nanotips, making disposable sensor tips for microscopy more practical.
• The method does not require complex lithography or etching, simplifying setup and reducing equipment costs.
• Can produce tips with varied shapes and sizes, including extremely sharp tips with nanometer or even atomic dimensions.
• Allows integration of various functional materials and dopants to tailor tips' electrical, optical, or mechanical properties.
• Offers high flexibility in the choice of precursor materials and substrates, making the process adaptable to various requirements.
• The process enables tips with spatially inhomogeneous composition, potentially providing novel functionalities not accessible via traditional methods.

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Patent Abstract

The present invention relates to a method for production of tips, whose order of magnitude is in the micrometre and/or nanometre range, in which a precursor material is brought into contact with a matrix and is then energetically activated over a large area, with the precursor material containing an element, other than carbon, from the second to fifth main group of the periodic table, the sixth group of the periodic table with an atomic number Z = 16, or a transition group from the periodic table of the elements as well as organic groups, which are bonded to the respective element chemically directly and/or via an element from the sixth main group.