Device and Method for Generating an Electrical Plasma

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This invention describes a device and method for generating an electric plasma, featuring at least one hollow electrode and another electrode to help form the plasma. The hollow electrode is cooled by a special cooling system designed as a heat pipe, which is partially placed inside the electrode to efficiently manage heat during plasma generation.

Use CasesContent extracted from patent full text and abstract with AI.

• Industrial plasma generators for material processing (e.g., cutting, welding, surface treatment)
• Plasma sources in medical devices for sterilization or surgery
• Plasma reactors for scientific research purposes
• Plasma-based air purification or pollution control systems
• Semiconductor manufacturing processes using plasma etching or deposition

BenefitsContent extracted from patent full text and abstract with AI.

• Improved cooling of the electrode helps extend equipment lifespan and reliability
• Efficient heat management allows for sustained and stable plasma generation
• Reduces the risk of overheating and associated equipment failure
• Enables the generation of high-quality plasma suitable for various advanced applications

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Patent Abstract

Die Erfindung betrifft eine Vorrichtung zur Erzeugung eines elektrischen Plasmas mit wenigstens einer ersten hohlen Elektrode und einer zweiten Elektrode zum Ausbilden des Plasmas und einer Kühlvorrichtung geeignet zum Kühlen der ersten hohlen Elektrode, wobei die Kühlvorrichtung als ein Wärmerohr ausgebildet ist und wenigstens teilweise innerhalb der ersten hohlen Elektrode angeordnet ist.