Self-supporting Cvd Diamond Film and Method for Producing a Self-Supporting Cvd Diamond Film

Simple SummaryContent extracted from patent full text and abstract with AI.

This patent discloses a self-supporting chemical vapor deposition (CVD) diamond film formed by stacking multiple diamond layers, each featuring a gradient in crystal size from fine (2–50 nm) at the lower side to coarser (50–500 nm) at the upper side. The invention also describes a cost-effective and scalable method for producing such robust and large-area diamond films, which can be further doped and integrated into electronic or mechanical devices.

Use CasesContent extracted from patent full text and abstract with AI.

• Protective coatings in high-wear mechanical components (e.g., tools, bearings, engine parts)
• Heat spreaders or thermal management substrates in electronics and optoelectronics
• Robust, planar substrates for semiconductor device fabrication and MEMS
• Electrodes or components for sensors and quantum devices requiring high thermal stability and chemical inertness
• Windows in high-power laser systems or harsh environments due to diamond's transparency and durability
• Substrates in biotechnology (e.g., microfluidics) for their chemical inertness and biocompatibility
• Components in advanced power electronics, such as diamond-based transistors or diodes

BenefitsContent extracted from patent full text and abstract with AI.

• Enables fabrication of larger, flat, and mechanically robust diamond films compared to previous methods
• Offers fine control over crystal structure and surface quality for customized applications
• Scalable and cost-effective production technique suitable for industrial use
• Improved handling due to increased mechanical strength and planarity
• Flexibility for semiconductor applications via possible n- and p-type doping
• Surface can be tailored for specific adhesion or integration needs, such as metallization or bonding to other materials
• Potential for integration into a wide variety of high-performance and high-reliability devices due to diamond's extreme properties

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Inventors & Applicants

Patent Abstract

The invention relates to a self-supporting CVD diamond film comprising a plurality of diamond layers (8) lying one over the other, wherein a lower side of each diamond layer (8) is made of diamond having a first average crystal size of 2 to 50 nm, wherein the average crystal size increases within the diamond layer (8) from the lower side to an upper side of the diamond layer (8), and wherein a second average crystal size in the area of the upper side is 50 to 500 nm.