Device and Method for Coating a Substrate by CVD

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This invention describes a device and method for coating substrates—such as with diamond or silicon—using chemical vapor deposition (CVD). The innovation centers on an improved heating conductor array where each heating wire (used to heat the CVD chamber) is kept taut using a special tensioning mechanism featuring a weighted swivel arm. This design efficiently compensates for thermal expansion and prevents the heating wires from sagging or breaking, increasing their durability and reducing the need for frequent replacements.

Use CasesContent extracted from patent full text and abstract with AI.

• Manufacturing of high-quality diamond or silicon coatings for industrial or electronic components using CVD.
• Mass production of coated cutting tools, semiconductor substrates, or wear-resistant parts.
• Production environments requiring repeated CVD processing without frequent downtime for maintenance.
• Research laboratories working on advanced materials synthesis with reduced operating costs.
• Fabrication of optoelectronic devices with precision thin-film coatings.

BenefitsContent extracted from patent full text and abstract with AI.

• Significantly increases the lifespan of heating wires, enabling up to 50 coating cycles without replacement.
• Reduces maintenance downtime, operational costs, and material waste in CVD systems.
• Ensures consistently taut heating wires, leading to reliable coating quality across cycles.
• Reduces required electrical power by allowing the use of thinner heating wires.
• Mitigates thermal expansion issues automatically, preserving accurate wire positioning and process reproducibility.
• Enables robust, efficient, and scalable CVD system designs for industrial use.

Technical Classifications (CPCs)

Inventors & Applicants

Patent Abstract

The invention relates to a device for coating a substrate (14) using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors (2) is provided in a housing (10), said heat conductors extending between a first (1) and a second electrode (8), wherein the heat conductors (2) are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (2), the invention proposes that the tensioning device comprises a tilt arm (5) having a tensioning weight (G), the heat conductor (2) being attached to the first end (E1) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).