Method for Producing a Continuous Diffractive Optical Element, Device for Carrying Out the Production Method, and Continuous Diffractive Optical Element

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This patent discloses a method and device for creating highly efficient, continuous diffractive optical elements (DOEs) specifically designed for shaping laser beams, especially for high-power laser applications. Unlike traditional micro-structuring methods that require material deposition or etching through photolithography, this invention uses precisely focused heating laser beams to induce bulges directly in the dielectric layer of a specialized laser mirror. These controlled bulges create a continuous topographical profile, enabling superior beam-shaping accuracy and efficiency. The invention also includes a dedicated apparatus to handle and position the laser mirror and direct the heating laser, ensuring precise fabrication.

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• Manufacturing high-efficiency optical components for industrial or scientific high-power laser systems.
• Designing custom beam shapers for medical laser equipment (e.g., ophthalmology, dermatology).
• Integration in telecommunications or data storage systems where precise laser beam modulation is required.
• Development of advanced optical instruments for research, such as microscopes or laser-based measurement devices.
• Use in laser-based material processing (cutting, welding, lithography) requiring custom beam profiles for improved precision or throughput.

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• Enables fabrication of continuous-profile DOEs with extremely high diffraction efficiency (comparable to 2500-step quasi-continuous DOEs).
• Significantly reduces processing complexity and time by avoiding multi-step lithography and etching traditionally needed for micro-structuring.
• Allows for precise control over the surface topography (down to 0.1 nm resolution), facilitating custom and complex optical functions.
• Improved suitability for high-power and high-durability laser applications due to the thermal and optical robustness of the resulting elements.
• Reduced material waste, process steps, and costs compared to conventional DOE manufacturing.
• The continuous nature of the produced elements overcomes efficiency limitations of multi-level DOEs (which are capped at about 98% transmission).

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Patent Abstract

The invention relates to a method for producing a diffractive optical element (10) for beam shaping of a laser beam at a first wavelength (λ1) of at least 100 nm, comprising the steps of: - providing a laser mirror (12), the laser mirror (12) having a layer-like construction made of a substrate (14), a dielectric materials layer (18) and optionally an absorption layer (16), the dielectric materials layer (18) adjoining the substrate (14) or the absorption layer (16) being situated between the substrate (14) and the dielectric materials layer (18), and - generating a plurality of bulges (24) in the dielectric materials layer (18) by treating the laser mirror (12) with a series of focused heating laser beams (38) at a second wavelength (λ2), the plurality of bulges (24) having a height (32) perpendicular to the dielectric materials layer (18) and at least one bulge having a height (32) of at least half the first wavelength (λ1).