Infrared microsensor

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This patent describes a novel infrared (IR) microsensor that detects electromagnetic radiation, particularly in or near the infrared spectrum. The sensor consists of a small measurement chamber filled with a fluid that selectively absorbs IR radiation. When IR radiation enters the chamber, the fluid's volume changes due to absorption, and this change is measured by observing the height of the fluid column in a connected standpipe. The microsensor can be manufactured using microfabrication techniques and can operate without temperature regulation. Arrays of these microsensors can be produced for advanced imaging or sensing applications.

Use CasesContent extracted from patent full text and abstract with AI.

• Thermal imaging cameras for night vision in automotive and aviation sectors
• Industrial process monitoring and safety systems
• Firefighting equipment for detecting hot spots or people in low visibility
• Medical and veterinary diagnostics, such as non-invasive temperature measurement or thermal mapping
• Military and civil mine detection using IR imaging
• Portable IR sensors for home or smart building security systems
• Wearable health monitoring devices that track body temperature through IR detection

BenefitsContent extracted from patent full text and abstract with AI.

• Highly sensitive detection of infrared radiation even at microscale dimensions
• Operates without need for cooling or precise temperature control, reducing complexity and cost
• Compact, robust, and suitable for mass production via microfabrication
• Enables miniaturization, making integration into portable or embedded systems easier
• Arrays of sensors can provide detailed IR imaging capabilities with directionality and spatial resolution
• Resistant to slow background temperature changes due to integrated compensation chamber, improving reliability
• Low energy consumption compared to traditional cooled IR detectors

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Inventors & Applicants

Patent Abstract

The sensor has a measurement chamber (2) filled with fluid, which absorbs radiation (1) selectively. The chamber has a recess, which is positioned in a substrate. The recess is covered partially on an active side by a window layer (7) forming an inflow window. A standpipe (11) stays in connection with the measurement chamber. The fluid forms a column, which varies in height, in the pipe. A unit is provided for measuring the height. An independent claim is also included for a method for selection of sensor arrays.